SFS 6100, SFS 6200, SFS 6220, SFS 6400, SFS 6420 Sold and Supported

KLA-TENCOR SURFSCAN 6100, 6200, 6220, 6400, and 6420


The Tencor Surfscan is a non-pattered surface inspection system, capable of (2"-4" with Custom Mod) or 4"-8" wafers. 


Detection is as low as 90nm on some models.



At Brumley South, Inc. we offer refurbished KLA Tencor Surfscan Systems for Sale, Lease or even Rentals. All work is done on-site by our certified technicians, who can refurbish your wafer inspection tool back to factory specifications. 


During our refurbishing process we will complete an inspection of your metrology system and replace any items that are going bad or are known to go bad in the future.  Our tools go into a class 10 clean room for final testing & calibration and on to final burn in for  of extensive testing. 


When you purchase a refurbished wafer inspection system from BSI, Inc. you can be sure it has had the highest quality of testing and calibration available. 





Need Manuals or PM Check List? Let us know and we can e-mail them right out!


We have Service Engineers ready to come on site to take care of your PM and NIST Calibration needs.



Upgrades and New Designs


Brumley South has designed many New and Tool Enhancing Upgrades for the Surfscan tools.


Contact us for Details and How We Can Save You Money and Enhance your Surfscan tools!






Yes, Contact us for the Tech Questions you have and we can get you back up and running!



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