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KLA-Tencor Surfscan 6400          
Unpatterned Surface Inspection System

R E F U R B I S H E D

  • Bare Wafer Surface Defect Inspection System
  • The Surfscan 6400 is a highly advanced inspection system designed specifically for detecting defects on bare wafer surfaces./li>
  • System can handle up to 200mm capable
  • Cassette Handling: Single puck handling from single cassette or platform
  • Substrate Thickness: Automatic adjustment within 2 mm range
  • Material: Any surface that scatters less than 90% of incident light
Defect Sensitivity
  • - Most Surfaces: Better than 0.20 um (depending upon surface quality)
  • - Polished Silicon: Better than 0.15 um at 95% capture rate
Repeatability Error:

Count repeatability error less than 1.5% at 1 standard deviation (Mean count greater than 500 for 0.364-um diameter latex spheres on bare silicon)

  • Count Accuracy: Better than 99% as verified with VLSI Standards
  • Relative Standard Spatial Resolution: 50 um spacing, minimum
  • Dynamic Range: 0.1 um to 100 um in a single measurement
  • - Up to 120 wafers per hour using 150 mm wafers
  • - Up to 95 wafers per hour using 200 mm wafers
  • Contamination: Less than 0.5 particles/cm squared greater than 0.20 um diameter per single pass