KLA-Tencor Surfscan 6400          
Unpatterned Surface Inspection System

R E F U R B I S H E D

ABOUT

• Bare Wafer Surface Defect Inspection System
• The Surfscan 6400 is a highly advanced inspection system designed specifically for detecting defects on bare wafer surfaces./li>
• System can handle up to 200mm capable
• Cassette Handling: Single puck handling from single cassette or platform
• Substrate Thickness: Automatic adjustment within 2 mm range
• Material: Any surface that scatters less than 90% of incident light

Defect Sensitivity

• - Most Surfaces: Better than 0.20 um (depending upon surface quality)
• - Polished Silicon: Better than 0.15 um at 95% capture rate

Repeatability Error:

Count repeatability error less than 1.5% at 1 standard deviation (Mean count greater than 500 for 0.364-um diameter latex spheres on bare silicon)

• Count Accuracy: Better than 99% as verified with VLSI Standards
• Relative Standard Spatial Resolution: 50 um spacing, minimum
• Dynamic Range: 0.1 um to 100 um in a single measurement
• - Up to 120 wafers per hour using 150 mm wafers
• - Up to 95 wafers per hour using 200 mm wafers
• Contamination: Less than 0.5 particles/cm squared greater than 0.20 um diameter per single pass