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| KLA-Tencor Surfscan PN 0044807-000 | Hard Disk, SCSI, SFS6XX0 |
| KLA-Tencor Surfscan PN 0091837-000 | Retrofit Kit, DD Monitor, S6x00 |
| KLA-Tencor Surfscan PN 0130029-000 | PCB Assy, Tested, 4-Channel Motor Control Handler |
| KLA-Tencor Surfscan PN 0130035-000 | PCB Assy, Timing Generator EMI S62xx, Tested |
| KLA-Tencor Surfscan PN 145319 | Blade, Shutter |
| KLA-Tencor Surfscan PN 156671 | Assy, Shutter Left side, S6x00 |
| KLA-Tencor Surfscan PN 157198 | Vacuum Assy, Shuttle, S6 |
| KLA-Tencor Surfscan PN 159328 | Below Wafer Mirror |
| KLA-Tencor Surfscan PN 160431 | DC Module Assy 6200 |
| KLA-Tencor Surfscan PN 162965 | Filter, N/D, S62xx |
| KLA-Tencor Surfscan PN 163996 | PCB Assembly, Motor Distribution, S6xx0 |
| KLA-Tencor Surfscan PN 165573 | Interlock S6x00 |
| KLA-Tencor Surfscan PN 169145 | PMT Assy, 488nm, S6200 |
| KLA-Tencor Surfscan PN 168823 | Turning Mirror Assembly, 1.5D, 488NM, Beam Split |
| KLA-Tencor Surfscan PN 180092 | Option, Locator, 100/150mm, SFS6 |
| KLA-Tencor Surfscan PN 181714 | Locator Plate Assy, Wafer 200mm with Filter |
| KLA-Tencor Surfscan PN 182354 | Laser, Shutter Assy, S6x00 |
| KLA-Tencor Surfscan PN 187151 | PCB Assy Below Wafer Detector |
| KLA-Tencor Surfscan PN 188859 | PCB Assy, 4-Channel Motor Driver, S6200 |
| KLA-Tencor Surfscan PN 198331 | PCB Assy, 4 Channel Motor |
| KLA-Tencor Surfscan PN 204587 | PCB Assy, 1-port I/O Emulex DCP-88I-512-NC, S6200 |
| KLA-Tencor Surfscan PN 206385 | Tencor Part |
| KLA-Tencor Surfscan PN 210021 | Pin Assy, Locator, S6200 |
| KLA-Tencor Surfscan PN 212849 | Locator Assy, 125mm |
| KLA-Tencor Surfscan PN 215791 | Indexer Assy, 25 Slots, Right |
| KLA-Tencor Surfscan PN 215805 | Indexer Assy, 25 Slots, Left |
| KLA-Tencor Surfscan PN 233676 | PCB Assy, Server Keyboard |
| KLA-Tencor Surfscan PN 238740 | PCB Assy GPIO SFS6400 |
| KLA-Tencor Surfscan PN 242071 | Locator Assy, 150mm, S6200 |
| KLA-Tencor Surfscan PN 246611 | Option, Locator, FL 182, 125mm, S6400 |
| KLA-Tencor Surfscan PN 266671 | Option, Chuck/Loc, 150mm |
| KLA-Tencor Surfscan PN 271993 | CCM Assy. Focus, S6400 |
| KLA-Tencor Surfscan PN 273163 | PCB Assy, Particle/Area Processor |
| KLA-Tencor Surfscan PN 273341 | PCB Assembly, Haze Separator, 2X SMPL HAZE, 2X 16 RVF |
| KLA-Tencor Surfscan PN 290343 | Lens, Focal, L2, S6420 |
| KLA-Tencor Surfscan PN 290360 | Field Lens, Cylindrical, L3, S6420 |
| KLA-Tencor Surfscan PN 290378 | Field Mirror, Cylinder, M3, S6420 |
| KLA-Tencor Surfscan PN 290653 | PMT Assy, S6420 |
| KLA-Tencor Surfscan PN 293407 | Mirror, Parabolic, Below |
| KLA-Tencor Surfscan PN 311979 | Lens, Cell Assy |
| KLA-Tencor Surfscan PN 318230 | Preamp Assy, Fiber PMT, S |
| KLA-Tencor Surfscan PN 318809 | PCB Assembly, Below Wafer Detector, S6420 |
| KLA-Tencor Surfscan PN 329134 | Beam Dump, Fiber Channel |
| KLA-Tencor Surfscan PN 344079 | Mirror Assy, Elliptical |
| KLA-Tencor Surfscan PN 345253 | PCB Assy, Timing Generator |
| KLA-Tencor Surfscan PN 346888 | Scanner, IPX, Dual Band, GSI |
| KLA-Tencor Surfscan PN 348368 | Transfer Glass |
| KLA-Tencor Surfscan PN 398519 | PCB Assy. |
| KLA-Tencor Surfscan PN 521035 | PCB Assembly, 8 Channel Relay I/O, Config |
| KLA-Tencor Surfscan PN 529044 | PCB Assembly, JATON Video-60P S6x20 |
| KLA-Tencor Surfscan PN 529419 | PCB ASSY 1-port I/O EMULEX |
| KLA-Tencor Surfscan PN 531430 | PCB Assy Analog Board, S6220 (ADC) |
