KLA-Tencor Surfscan 6200
Unpatterned Surface Inspection System
R E F U R B I S H E D
ABOUT
- Bare Wafer Surface Defect Inspection System
- Max Wafer Capable: 8”/200mm
- System configured for 8“/200mm wafers
- Defect Sensitivity: 0.12um
- Defect Map and Histogram with Zoom
- Haze Map and Histogram with Zoom
- Argon Ion Laser (488nm)
- 2D Signal Integration
- Software:
- Microsoft Windows 98, Version 4.2
- Software Enhancement
- Computer Upgrade
- Pentium Computer
- Software Capable for Wafer Map and Histogram
- Parallel Printer Port
- Blower Box
- SECS II Communication Port
- Operations Manual and Documentation
- Power Supply will fit to the Customer Location
- One backup hard drive supplied to customer
- 6 Month Warranty on Parts and Labor (Laser warranty is 6 months or 5000 hours whichever comes first, Puck is not covered under warranty)
Note: If calibration wafers are required, please inform the size and type needed, and they will be quoted separately
CONDITION
- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad Circuit Board
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed
- Optics assemblies cleaned and aligned to meet performance specs or replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- System transport locks installed; system prepared for shipment
- Refurbishment carried out by KLA-Tencor Trained Technicians
- Windows OS
- Excellent Condition Guaranteed.
- 6 Month Warranty and Full Specifications Guarantee.
- 30 Day Right of Return.