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KLA-Tencor Surfscan 6200        
Unpatterned Surface Inspection System


  • Bare Wafer Surface Defect Inspection System
  • Max Wafer Capable: 8”/200mm
  • System configured for 8“/200mm wafers
  • Defect Sensitivity: 0.12um
  • Defect Map and Histogram with Zoom
  • Haze Map and Histogram with Zoom
  • Argon Ion Laser (488nm)
  • 2D Signal Integration
  • Software:
    • Microsoft Windows 98, Version 4.2
    • Software Enhancement
    • Computer Upgrade
  • Pentium Computer
  • Software Capable for Wafer Map and Histogram
  • Parallel Printer Port
  • Blower Box
  • SECS II Communication Port
  • Operations Manual and Documentation
  • Power Supply will fit to the Customer Location
  • One backup hard drive supplied to customer
  • 6 Month Warranty on Parts and Labor (Laser warranty is 6 months or 5000 hours whichever comes first, Puck is not covered under warranty)

Note: If calibration wafers are required, please inform the size and type needed, and they will be quoted separately

  • Replace used Laser with New Laser
  • Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
  • Replace used Power Supply, as required
  • Replacement or repair of any bad Circuit Board
  • Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed
  • Optics assemblies cleaned and aligned to meet performance specs or replaced as needed
  • Electronic assemblies tested to meet performance specifications or replaced as needed
  • Puck assembly rebuilt or replaced (if applicable)
  • Calibrate system using calibration wafers
  • Machine covers are cleaned, polished, or replaced, as needed
  • System transport locks installed; system prepared for shipment
  • Refurbishment carried out by KLA-Tencor Trained Technicians
  • Windows OS
  • Excellent Condition Guaranteed.
  • 6 Month Warranty and Full Specifications Guarantee.
  • 30 Day Right of Return.