KLA-Tencor Surfscan 6200        
Unpatterned Surface Inspection System

R E F U R B I S H E D

ABOUT

• Bare Wafer Surface Defect Inspection System
• Max Wafer Capable: 8”/200mm
• System configured for 8“/200mm wafers
• Defect Sensitivity: 0.12um
• Defect Map and Histogram with Zoom
• Haze Map and Histogram with Zoom
• Argon Ion Laser (488nm)
• 2D Signal Integration
• Software:
  • Microsoft Windows 98, Version 4.2
  • Software Enhancement
  • Computer Upgrade
• Pentium Computer
• Software Capable for Wafer Map and Histogram
• Parallel Printer Port
• Blower Box
• SECS II Communication Port
• Operations Manual and Documentation
• Power Supply will fit to the Customer Location
• One backup hard drive supplied to customer
• 6 Month Warranty on Parts and Labor (Laser warranty is 6 months or 5000 hours whichever comes first, Puck is not covered under warranty)

Note: If calibration wafers are required, please inform the size and type needed, and they will be quoted separately

CONDITION  

• Replace used Laser with New Laser
• Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
• Replace used Power Supply, as required
• Replacement or repair of any bad Circuit Board
• Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed
• Optics assemblies cleaned and aligned to meet performance specs or replaced as needed
• Electronic assemblies tested to meet performance specifications or replaced as needed
• Puck assembly rebuilt or replaced (if applicable)
• Calibrate system using calibration wafers
• Machine covers are cleaned, polished, or replaced, as needed
• System transport locks installed; system prepared for shipment
• Refurbishment carried out by KLA-Tencor Trained Technicians
• Windows OS
• Excellent Condition Guaranteed.
• 6 Month Warranty and Full Specifications Guarantee.
• 30 Day Right of Return.